...控制; 牛顿法; 非线性PID; 微动台[gap=1255]Key words: MIMO feed-forward control; Newton method; nonlinear PID; micro stage...
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将有限元模态分析值和实验测试结果相比较，探讨影响微动工作台动态性能的综合因素，为微动台的设计提供理论和实验依据。
The simulated results were compared with the corresponding experimental ones in order to analyze the factors influencing the dynamic properties, and it provides...
针对宏微进给系统，利用弹性铰的微变形原理设计了宏微系统中的微动台。采用最小位能原理推导出一般弹性铰的二维刚度矩阵；
For the system of macro micro-feed table, a micro-feed table in macro-micro dual system was designed by using of flexure hinge.
磁悬浮式微动工作台由于运动平台和驱动机构采用非接触式的磁悬浮驱动技术而易于实现大范围高精度的微运动。
Magnetic levitation micromotion stage is easy to realize micromotion with high resolution because a contact-free magnetic levitation technique is used between the moving plate and the driving part.
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