...控制; 牛顿法; 非线性PID; 微动台[gap=1255]Key words: MIMO feed-forward control; Newton method; nonlinear PID; micro stage...
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将有限元模态分析值和实验测试结果相比较，探讨影响微动工作台动态性能的综合因素，为微动台的设计提供理论和实验依据。
The simulated results were compared with the corresponding experimental ones in order to analyze the factors influencing the dynamic properties, and it provides...
针对宏微进给系统，利用弹性铰的微变形原理设计了宏微系统中的微动台。采用最小位能原理推导出一般弹性铰的二维刚度矩阵；
For the system of macro micro-feed table, a micro-feed table in macro-micro dual system was designed by using of flexure hinge.
微动工作台是微机械系统的重要组成部分，是实现高精度定位的关键部件。
The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning.
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