将有限元模态分析值和实验测试结果相比较，探讨影响微动工作台动态性能的综合因素，为微动台的设计提供理论和实验依据。
The simulated results were compared with the corresponding experimental ones in order to analyze the factors influencing the dynamic properties, and it provides...
针对宏微进给系统，利用弹性铰的微变形原理设计了宏微系统中的微动台。采用最小位能原理推导出一般弹性铰的二维刚度矩阵；
For the system of macro micro-feed table, a micro-feed table in macro-micro dual system was designed by using of flexure hinge.
磁悬浮式微动工作台由于运动平台和驱动机构采用非接触式的磁悬浮驱动技术而易于实现大范围高精度的微运动。
Magnetic levitation micromotion stage is easy to realize micromotion with high resolution because a contact-free magnetic levitation technique is used between the moving plate and the driving part.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
The principle, structure, design and calculating methods on micro displacement worktable with three degrees of freedom supported by elastic guides are presented.
微动工作台是微机械系统的重要组成部分，是实现高精度定位的关键部件。
The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning.
介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。
A kind of piezoelectric micro-actuator with Nano-step and long range, based on the principle of inchworm motion, is introduced in this paper.
为研究微动工作台提供了参考。
This provides reference for the research on micro-motion platform.
重点介绍了一种基于PZT驱动的双柔性平行四连杆结构二维微动工作台。
A novel 2-D micro-positioner drived by PZT was introduced, which is based on the double flexible hinges in a structure of parallel four-linkage.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
This paper presents the structure, the principle and the designing and calculation method of the micro displacement worktable which has six degrees of freedom.
介绍了6自由度微动工作台的原理、结构、设计计算方法，弹性导轨及柔性铰链在微动工作台中的应用。
This paper primarily introduces the design process of bidirectional flexure hinge and universal flexure hinge, which are used as rotational join of 6 degrees of freedom micro table.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable.
应用推荐