微加速度计 accelerometer
微型静电加速计 miniature electrostatic accelerometer ; MESA
微型加速度计 Micro Accelerometer ; Micromechanical Accelerometer
微机械加速度计 Micromachined accelerometer ; micromechanical resonant accelerometer ; mems accelerometer
复合量程微加速度计 Multi-Ranged Micro Accelerometer
高G微加速度计 High-G Micro-Accelerometer
微硅加速度计 micromechanical silicon accelerometer
根据设计的单轴电容式微加速计分析了微加速计的建模方法以及加速度计性能指标与设计参数之间的数学关系。
According the designed single axis micro accelerometer, its modeling means is presented. The relations between its design parameters and its performance index are analyzed.
线性测试结果表明该复合量程微加速度计具有较好的线性度，因而可以同时在测量四个不同的量程的加速度值。
Finally, the testing demonstrates that such a multi-ranged sensor has a good linearity, thus it can be used to measure four accelerations within four individual ranges.
介绍了用光干涉法测量微加速度计零件变形的研究。
A study on measurement of deformation micro-accelerometer parts with optical interferometry is presented.
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