...加速度计 关键词：微机械加速度计；四梁中心悬臂结构；稳定性；量程；参数 [gap=1054]Key words: Micromachined accelerometer；Four central suspension beams structure；Stability；Measurement range；Parameter ..
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微机械加速度计的输出受到环境温度的影响。
The output of MEMS accelerometer is influenced by the environment temperature.
讨论了一种梳齿式微机械加速度计的静态模型。
This paper discusses the static model of a multi-finger micromechanical accelerometer.
灌封是高量程微机械加速度计实用化的一个关键步骤。
Potting is a key step for the packaging of high-g micro-electro-mechanical system(MEMS) accelerometer.
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