另外，化学湿式蚀刻的方式可以让制造工艺步骤更简单，技术成本降低。
In addition, by utilizing the secondary wet type etching method, the manufacture process step is simpler, and the technical cost is decreased.
本发明提供一外延沉积工艺，其包含干式蚀刻工艺与后续的外延沉积工艺。
An epitaxial deposition process including a dry etch process, followed by an epitaxial deposition process is disclosed.
另外，在制造工艺中使用湿式蚀刻也可增加批次放大，降低制造工艺的成本。
In addition, by utilizing the wet type etching in the manufacture process, the batch amplification can be increased, and the cost of the manufacture process is decreased.
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