薄片的步进式光刻 wafer stepper lithography
浸入式光刻技术 Immersion Lithography ; immersion lithography technology
软接触式光刻 soft contact lithography
接近式光刻机 proximity aligner
浸没式光刻 immersion lithography
沉浸式光刻 Immersion Lithography
接触式光刻机 Contact Aligner
扫描投影式光刻机 Scanning Projection Aligner
浸入式光刻 Immersion lithography
沉浸式光刻技术 Immersion Lithography process
介绍了调整扫描投影式光刻机畸变的几种方法。
Essay brief a few kind methods of correcting distortion of Scan Projection Mask Alignment System.
讨论了采用浸液式光刻获得的成像结果和套刻结果。
In this paper we discuss the results on imaging and overlay obtained with immersion.
本文介绍制造回光栅所采用的一种新型接近式光刻系统的原理、结构和光刻性能。
In this paper, the principle, construction and function of a new near photolithography system for manufacturing circular gratings are introduced.
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