薄片的步进式光刻 wafer stepper lithography
浸入式光刻技术 Immersion Lithography ; immersion lithography technology
软接触式光刻 soft contact lithography
接近式光刻机 proximity aligner
浸没式光刻 immersion lithography
沉浸式光刻 Immersion Lithography
接触式光刻机 Contact Aligner
扫描投影式光刻机 Scanning Projection Aligner
浸入式光刻 Immersion lithography
沉浸式光刻技术 Immersion Lithography process
不过他表示闪存业者会使用液浸式光刻机制造位密度在64 - 128gbit的闪存芯片产品。
However, he did say chip makers expect to ship 64 and 128 Gbit flash devices using immersion tools.
这款产品将使用Intel第三代HKMG工艺，第五代硅应变技术，另外与32nm类似，22nm制程仍将继续使用193nm液浸式光刻技术。
It will also use copper interconnects, low-k, strain silicon and other features. Like 32-nm, Intel will make use of 193-nm immersion lithography.
讨论了采用浸液式光刻获得的成像结果和套刻结果。
In this paper we discuss the results on imaging and overlay obtained with immersion.
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