设计了一种衍折射光学元件用于多模光束的整形和聚焦。
A diffractive refractive optical element used for multimode laser beams is designed to achieve a tiny focused speckle on the predefined output plane.
方法利用矩阵光学方法，推导了高斯光束经耦合系统聚焦后束腰宽度和像距的计算公式。
Methods By the matrix optical method, formulae of waist width and imaging distance of focused Gaussian beams through the coupling system are derived.
为了探测衬底是否处在检查设备的焦平面上，一种光学聚焦传感器被布置为通过物镜接收辐射光束。
To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens.
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