设计了一种衍折射光学元件用于多模光束的整形和聚焦。
A diffractive refractive optical element used for multimode laser beams is designed to achieve a tiny focused speckle on the predefined output plane.
方法利用矩阵光学方法，推导了高斯光束经耦合系统聚焦后束腰宽度和像距的计算公式。
Methods By the matrix optical method, formulae of waist width and imaging distance of focused Gaussian beams through the coupling system are derived.
为了探测衬底是否处在检查设备的焦平面上，一种光学聚焦传感器被布置为通过物镜接收辐射光束。
To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens.
已有大量文献对光束的聚焦特性进行了详细的研究，光束聚焦特性的进一步研究对激光束的应用和光学系统的设计有着极大的实际意义。
Recently, a lot of literatures have studied focusing properties of beams particularly. Further studies of beam focusing are of great significance for lasers application and design of optical system.
利用ZEMAX光学软件对系统进行光线追迹获得光束经过柱面镜后的聚焦情况。
ZEMAX software is used for optical ray tracking of the system to get images after cylindrical lens.
利用ZEMAX光学设计软件模拟半导体激光光路，包括光束整形、准直及聚焦透镜的设计等。
The light paths of the diode laser was simulated by ZEMAX, including the designs of beam arrangement, collimation lens and focus units.
该装置包括半导体激光光源、光束整形系统、光束传输系统、光束扫描系统、光学聚焦系统等。
The device comprises a semiconductor laser light source, an optical beam shaping system, an optical beam transmission system, an optical beam scanning system, an optical focusing system, and the like.
利用ZEMAX光学设计软件模拟半导体激光光路，包括光束整形、准直、聚焦等光束变换方式，实现了多种尺寸的光斑输出。
By using ZEMAX to simulate the diode laser optical path, including beam shaping, collimation, focus, etc., several kinds of spot outputs with various sizes was implemented.
光学聚焦传感器包括分束器，该分束器配置为将辐射光束分为第一子光束和第二子光束。
The optical focus sensor includes a splitter configured to split the radiation beam into a first sub-beam and a second sub-beam.
推导出了正交的两组准直微透镜阵列的面形公式；计算了准直光束的准直精度和聚焦光学系统参数。
The orthogonal surface equation of the collimating micro-lenses array is derived, the divergence angles after collimating and the parameters of the focused lens are calculated.
推导出了正交的两组准直微透镜阵列的面形公式；计算了准直光束的准直精度和聚焦光学系统参数。
The orthogonal surface equation of the collimating micro-lenses array is derived, the divergence angles after collimating and the parameters of the focused lens are calculated.
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