延伸于缺口MF的两侧上的凹陷信道RC是通过保护层6中的缺口MF来予以制作，而保护层6横向蚀刻不足(under-etching)进入接触层5中。就此而论，凹陷信道的深度相当于接触层5的层厚度。
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... 紫外线灯加热型CVD系统 under water conveyor 水中输送机 under-etching 切割不足，蚀刻不足 underdrain equipment ...
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Under this etching condition the sensitivity and the efficiency of the Fuji film for the registration of protons have been determined.
在此蚀刻条件下，测定了富士膜记录质子的灵敏度和效率。
The influence on over etching and under etching to IC layout is analyzed, the computation model and realization method of IC critical area are presented.
论文在分析过刻蚀和欠刻蚀对IC版图影响的基础上，提出了基于工艺偏差影响的IC关键面积计算新模型和实现方法。
The contact bulges under the bridge are achieved by the full etching and partial etching of the polyimide sacrificial layer.
在工艺上，特别采用了对聚酰亚胺牺牲层进行全刻蚀和半刻蚀的改进加工流程来实现桥背面的接触点。
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