A new method of simultaneous determination the multi-parameters by use of transmission spectra and simulated annealing algorithm has been presented. Thin film parameters were obtained by solving the equations in inversion method from experimental transmission data.
提出了一种用透射光谱和模拟退火算法一次性同时确定薄膜多个参数的新方法,该方法是根据所测的光谱数据,通过解联立方程组来反演计算出薄膜参数的。
参考来源 - 透射光谱法测量薄膜参数的研究·2,447,543篇论文数据,部分数据来源于NoteExpress
The parameters of the optical slab glass waveguide (refractive index and thickness of thin film) were measured by a new technique for using the prism coupler, i. e., leaky mode method.
由使用棱镜耦合器的一种新技术即漏模法,测量了平板玻璃光波导的参数(薄膜的折射率和厚度)。
Through the selection of processing parameters and surface modification. The distribution of thin film stress is possible changed and thin film property is improved.
通过选择适当的工艺条件以及表面处理可以改变薄膜的应力分布,提高薄膜的性能。
Inductors without the magnetic thin-film are fabricated as the referential sample using the same processes, in which the structure parameters are consistent with the inductor with magnetic thin-film.
同时,采用相同工艺同批制作了无磁膜微电感作为对比样品,并取各项结构参数与磁膜电感相一致。
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