高深宽比的间隙使得难于淀积形成厚度均匀的膜，并且会产生夹 断(pinch-off)和空洞 ③好的厚度均匀性(Thickness Uniformity): 材料的电阻随薄膜厚度的变化而变化，因此薄膜厚度要均匀。 膜层越薄就会有更多的缺陷，如针孔，这会导致膜本身的机械强度降低。
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...明工程师社区 关键词:光学薄膜；膜厚均匀性；户外照明；平面行星夹具； [gap=388]Key words:optical film ;thickness uniformity ;outdoor lighting ;flat planetary holder ...
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resist thickness uniformity 抗蚀剂膜厚均质性
wall-thickness uniformity 壁厚均匀性
coating thickness uniformity 镀层均匀度
thickness uniformity of films 薄膜的厚度均匀性
thin film thickness uniformity 薄膜厚度均匀性
thickness uniformity of thin films 薄膜厚度均匀性
steel tube wall thickness uniformity 钢管壁厚均匀度
coating thickness and uniformity 包衣厚度和均匀性
The deposit of laval nozzle has a certain thickness uniformity requirements.
拉瓦尔喷管的电铸层有一定的均匀性要求。
This rack is easy to produce, and improves thickness uniformity of electrodeposits.
该挂具制作简单，能提高镀层厚度的均匀性。
The thickness uniformity of films deposited by planar magnetron sputtering target was analyzed theoretically.
从理论上分析了平面磁控溅射靶沉积薄膜的厚度均匀性。
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