The fourth chapter introduce the deposition and test method of SiNx ;
第四章介绍了氮化硅的制备方法和测试方法；
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Depositing SiNx thin film followed by hydrogen plasma treatment will result in better passivation effect.
先沉积氮化硅薄膜再氢等离子体处理能得到更好的钝化效果。
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