The fourth chapter introduce the deposition and test method of SiNx ;
第四章介绍了氮化硅的制备方法和测试方法；
Depositing SiNx thin film followed by hydrogen plasma treatment will result in better passivation effect.
先沉积氮化硅薄膜再氢等离子体处理能得到更好的钝化效果。
Depositing SiNx thin film followed by hydrogen plasma treatment will result in better passivation effect.
先沉积氮化硅薄膜再氢等离子体处理能得到更好的钝化效果。
应用推荐