Other techniques involve huge lumps of machinery, but Josephson junctions can be made using the sort of microfabrication technology employed for normal silicon chips.

其他技术都需要一堆巨大的机械装置，而约瑟夫森结则可以通过运用利用普通硅芯片的微型装配技术得到。

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The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.

叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。

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