Other techniques involve huge lumps of machinery, but Josephson junctions can be made using the sort of microfabrication technology employed for normal silicon chips.
其他技术都需要一堆巨大的机械装置，而约瑟夫森结则可以通过运用利用普通硅芯片的微型装配技术得到。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
应用推荐