silicon-based microfabrication
硅基精密加工
以上为机器翻译结果,长、整句建议使用 人工翻译 。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
叙述了硅基传感器微机械加工的特点和要求,简要说明了硅衬底微细加工的常用方法。
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