• The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.

    叙述传感器微机械加工特点要求简要说明了衬底微细加工常用方法

    youdao

  • The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.

    叙述传感器微机械加工特点要求简要说明了衬底微细加工常用方法

    youdao

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