Based on the working principle and mode of the step actuator, linear piezoelectric precision step actuator can be divided into two groups: outer driving mode and inner driving mode. 1. Studied the piezoelectric step actuator of outer driving mode.
论文提出了压电步进驱动器的双向推力工作方式,并且采用压电叠堆驱动方式有效的提高了驱动器的双向推力稳定性和均衡性。
参考来源 - 压电步进精密驱动器理论及实验研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Nanometer scale step standards are the keys for dimension transfer, and they are the important tools to evaluate and calibrate micro actuator and micro position devices such as piezoelectric scanner.
纳米级尺度实物标准是纳米尺寸传递体系中的关键环节，也是评价和校正压电驱动等微扫描微定位装置的重要工具。
A kind of piezoelectric micro-actuator with Nano-step and long range, based on the principle of inchworm motion, is introduced in this paper.
介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。
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