Nanometer scale step standards are the keys for dimension transfer, and they are the important tools to evaluate and calibrate micro actuator and micro position devices such as piezoelectric scanner.
纳米级尺度实物标准是纳米尺寸传递体系中的关键环节，也是评价和校正压电驱动等微扫描微定位装置的重要工具。
A kind of piezoelectric micro-actuator with Nano-step and long range, based on the principle of inchworm motion, is introduced in this paper.
介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。
A kind of piezoelectric micro-actuator with Nano-step and long range, based on the principle of inchworm motion, is introduced in this paper.
介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。
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