微波等离子化学气相沉积 (MPCVD )是目前制备高质量大面积金刚石膜的主要方法之一。同金刚石焊接刀具相比 ,金刚石涂层WC Co刀具具有优良的抗热冲击性能、高加工
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MPCVD resonance cavity MPCVD谐振腔
This is an alternative method for the synthesis of diamond-SiC composites by MPCVD.
此研究结果为制备金刚石和碳化硅复合材料提供了一种新的方法。
The globe-like diamond microcrystalline aggregates were fabricated by microwave plasma chemical vapor deposition (MPCVD) method.
以镍为催化剂,利用微波等离子体化学气相沉积法制备了弹簧状碳纤维。
By microwave designing for substrate heating materials, the larger uniform temperature field areas than the diameter of substrate holder in MPCVD device is obtained.
通过对基片加热材料的微波设计,在MPCVD装置中获得大于基片台直径的均匀温度分布区。
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