Collimate and coupling technique is the key technology of MOEMS optical array.
准直、耦合技术是MOEMS光开关阵列的一项关键技术。
MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
This paper presents theoretical analysis on the dynamic response of a MOEMS optical switch with a slant lower electrode.
本文从MOEMS倾斜下电极扭臂式光开关出发，介绍了动力学分析方法的过程。
应用推荐