MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
This paper presents theoretical analysis on the dynamic response of a MOEMS optical switch with a slant lower electrode.
本文从MOEMS倾斜下电极扭臂式光开关出发，介绍了动力学分析方法的过程。
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