A type of capacitive microsensor whose null point and gain can be regulated is introduced here.
文中介绍一种可调零点和增益的电容式微型传感器。
The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.
对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。
An electric field microsensor based on electrostatic comb -driven and differential detecting was presented.
研制了一种基于静电梳齿激励、差分检测式微型电场传感器。
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