Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.

多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。

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Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.

微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。

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In the area of manufacturing, lasers are used for drilling, cutting, joining, hardening, surface modification and micromachining.

在生产领域，激光可以用来钻孔、切割、连接、硬化以及进行表面改性和微加工。

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That work is still ongoing at MIT, but the pair left, with the idea of using the same silicon micromachining technology to build tiny "reformers" that could separate pure hydrogen from alcohol for fuel cells.

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