Mechanism, characteristic and application of excimer laser micromachining are introduced.

介绍了准分子激光微加工的机理、特点和应用。

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Handbook of Micro lithography, Micromachining, and Micro fabrication. Vol.1: microlithography.

微平版印术，显微机械加工，和微制作手册：卷一：微平版印术。

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Using micromachining technology, we also integrated micro-heater and temperature sensor on the chip.

利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。

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That work is still ongoing at MIT, but the pair left, with the idea of using the same silicon micromachining technology to build tiny "reformers" that could separate pure hydrogen from alcohol for fuel cells.

FORBES: Pip-squeak Power Plant