Using micromachining technology, we also integrated micro-heater and temperature sensor on the chip.

利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。

youdao

This paper examines the possibility and necessity of using micromachining technology for sensor manufacturing.

讨论利用微机械加工技术制作传感器的可能性、必然性。

youdao

Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.

多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。

youdao

That work is still ongoing at MIT, but the pair left, with the idea of using the same silicon micromachining technology to build tiny "reformers" that could separate pure hydrogen from alcohol for fuel cells.

FORBES: Pip-squeak Power Plant