surface micromachined 表面微机电
micromachined gyroscope 微机械陀螺 ; 微陀螺
Micromachined accelerometer 微机械加速度计
Piezoelectric Micromachined Ultrasonic Transducer 压电超声换能器 ; 微型压电超声换能器 ; 压电超声微换能器
micromachined vibratory gyroscope 微机械振动陀螺仪
silicon condenser micromachined microphone 硅微机械电容式麦克风
condenser silicon micromachined microphone 电容式硅微机械麦克风
Micromachined vibrating gyroscope is a new type inertial component.
微机械振动陀螺是新型的惯性元件。
Among the developed micromachined gyros, capacitive detection method is frequently used.
微机械陀螺常见的检测方式有电容式和压阻式。
A new structure silicon piezoresistive micromachined accelerometer has been designed, fabricated and tested.
设计、制造并测试了一种新结构硅微机械压阻加速度计。
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