...加速度计 关键词：微机械加速度计；四梁中心悬臂结构；稳定性；量程；参数 [gap=1054]Key words: Micromachined accelerometer；Four central suspension beams structure；Stability；Measurement range；Parameter ..
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micromachined accelerometer gyro 微机械加速度计陀螺
silicon micromachined accelerometer 硅微机械加速度传感器
micromachined capacitive accelerometer 电容式微加速度计
silicon micromachined shock accelerometer 冲击硅微机械加速度传感器
A micromachined accelerometer with piezoelectric thin film based on the piezoelectric effect is studied.
基于压电薄膜的压电效应，研究压电薄膜微机电加速度传感器。
A new structure silicon piezoresistive micromachined accelerometer has been designed, fabricated and tested.
设计、制造并测试了一种新结构硅微机械压阻加速度计。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
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