Numerical calculated results show that parameters,such as voltage,geometry dimensions of the micro mirror electrodes etc,can affect the edge effect,which leads a larger error in static response.
数值分析表明,微镜的激励电压、微镜电极的几何尺寸等参数都会影响微镜的边缘效应,从而使微镜的静态响应产生较大的误差。
参考来源 - 考虑边缘效应的微镜静电力学性能分析·2,447,543篇论文数据，部分数据来源于NoteExpress
MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
Using the KOH anisotropy enchant the vertical micro mirror array is fabricated. And also, the result of experiment is analyzed and discussed.
使用KOH各向异性腐蚀液制作了垂直微反射镜阵列，并对实验结果进行了分析和讨论。
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