MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
According to the two values, a micro-gear was fabricated by projection microstereolithography system using digital micro mirror dynamic mask.
根据测量的树脂的特性值，使用实验室开发的微反射镜动态掩膜微立体光刻系统，成功制作微齿轮。
Secondly, the reflective characteristic of micro mirror is analyzed. And then a normalized equation that governs the static characteristics of the electrostatic driving structure is derived.
其次，分析了光开关微反射镜的反射特性，然后推导了归一化的光开关静电驱动结构力矩平衡特性方程。
Optimal design of F-P MCIRDA has been achieved and structure parameters of movable micro-mirror has been determined by theoretical analysis.
通过理论分析，完成了F - P MCIRDA的优化设计，确定了可动微镜的结构参数。
Significantly, the former two-class nature frequency expressions for the micro-mirror cell structure are put forward for the first tine, which are compared with the results from FEM analysis.
首次提出了该结构前两阶频率的表达式，并与相应的有限元模态分析结果进行了比较。
Significantly, the former two-class nature frequency expressions for the micro-mirror cell structure are put forward for the first tine, which are compared with the results from FEM analysis.
首次提出了该结构前两阶频率的表达式，并与相应的有限元模态分析结果进行了比较。
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