Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.

微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。

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Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.

微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。

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The paper expatiated the principle of giant magnetostrictive motor from structure and properties, and the application status in micro electro mechanical systems (MEMS).

从结构和性能上阐述了超磁致伸缩微型马达的原理及其在微机电系统中的应用状况。

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Researchers in the field use the acronym MEMS, for micro-electro-mechanical systems.

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Edinburgh-based Wolfson, which specialises in audio parts for consumer electronic products, said sales were driven by a strong performances from its audio hubs and micro-electro-mechanical systems (Mems) microphone product lines.

BBC: Wolfson Microelectronics upbeat as chip sales surge