Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.

微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。

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The paper expatiated the principle of giant magnetostrictive motor from structure and properties, and the application status in micro electro mechanical systems (MEMS).

从结构和性能上阐述了超磁致伸缩微型马达的原理及其在微机电系统中的应用状况。

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Micro electro mechanical systems Multi-granularity macro-modeling Non-standard structure Model order reduction;

微机电系统； 多粒度宏建模； 非标结构； 模型降阶；

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Researchers in the field use the acronym MEMS, for micro-electro-mechanical systems.

FORBES: Exponential Growth in Small Machines - Don't Fear, They're Here to Protect You

Edinburgh-based Wolfson, which specialises in audio parts for consumer electronic products, said sales were driven by a strong performances from its audio hubs and micro-electro-mechanical systems (Mems) microphone product lines.

BBC: Wolfson Microelectronics upbeat as chip sales surge