Micro Systems Engineering includes Micro Electro-Mechanical Systems (MEMS) and related equipment design, manufacture and package.
微系统工程包括微机电系统(MEMS)及相关设备的设计、制造和封装。
With the fast development and wide application of MEMS (micro Electro-Mechanical Systems), it shows a tendency to develop new micro-seismometers.
随着微机电技术的广泛应用,开发微型化的新型地震计成为发展趋势。
These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control.
这些微器件与信号调节和处理电路集成后,组成了可执行分布式实时控制的微电子机械系统(MEMS)。
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