micro machining 微细加工 ; 微加工 ; 微纳加工
silicon bulk micro machining 微加工
Micro-machining Center 微加工中心
ultrasonic combined electric micro-machining 超声复合电加工
Pulse Electrochemical Micro Machining 脉冲电解微细加工
Micro-machining system based on AFM 基于原子力显微镜的微加工系统
mems micro machining mems加工
micro-machining tests 微细加工试验
This work designs a mask projecting micro-machining system of excimer laser, including homogenizer, projecting image system and locating monitor system.
本文主要从准分子激光的均束、投影成像和同轴监控定位三方面进行了研究,研制成功了一套准分子激光掩模投影微加工系统。
参考来源 - 准分子激光微加工光学系统研究The micro-machining system consists of a laser source with 355nm wavelength and a bridge style mechanical structure.
其中激光器选择355nm波长的紫外光源,结合光路系统和“龙门式”机械结构,构建了整个微加工系统的硬件平台。
参考来源 - 光敏玻璃紫外脉冲激光微加工理论与技术的研究Based on the increasing requirement in photosensitive glass shape-control fabrication, in this dissertation a UV nanosecond pulse laser micro-machining system is designed and successfully performs the micro-structure machining on the FOTURAN photosensitive glass.
本论文即针对光敏玻璃的形状精密加工需求,自主设计完成了一套紫外波长的纳秒脉冲激光精密加工系统,利用此系统实现了对FOTURAN光敏玻璃的微结构加工。
参考来源 - 光敏玻璃紫外脉冲激光微加工理论与技术的研究In the end, the process technology of Ultrasonic vibration combined PECM micro-machining is analyzed and summarized. Furthermore, process problems, shortage and its improvement means are also suggested.
最后对超声频振动复合脉冲电解微精加工工艺特性进行分析、总结,提出现有工艺方案存在的问题及完善的措施,并对后续研究工作提出了设想和展望。
参考来源 - 超声频振动复合脉冲电解微精加工机理及试验研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Wire electrochemical micromachining(WEMM) is a recent new method for micro-machining.
微细电化学线切割加工是最近出现的一种微细加工新方法。
Based on analyzing the data, the theories of scaling effect in micro-machining were validated primitively.
在对数据分析的基础上，初步验证了微切削中的尺度效应理论。
This paper introduces the computer simulation for the anisotropic etching used in micro-machining of sensors.
本文介绍传感器微机械加工中使用的各向异性腐蚀的计算机模拟。
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