sub micro lithography lens 亚微米投影光刻物镜
micro stereo-lithography 微立体光刻
micro stereo lithography 三维光刻技术
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As a newly coming micro fabrication technology, soft lithography use elastomeric stamp to replace hard stamp in traditional lithography to fabricate micro patterns and structures.
作为一种新型的微图形复制技术，软光刻技术用弹性模替代传统光刻技术中使用的硬模来产生微形状和微结构。
Laser lithography is one of the main methods for manufacturing micro-optical and the binary optical masks.
激光光刻是加工微光学及二元光学掩模的主要手段。
This article mainly explains the process of LIGA technology, which includes X-ray mask lithography, Micro-electroforming and Micro-copy.
本文主要阐述了LIGA技术的工艺过程，包括X射线深层光刻、微电铸和微复制工艺。
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