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RF MEMS switch is designed by computer aided design (CAD) method.
应用计算机辅助设计(CAD)方法模拟设计一种射频微机械(RF - MEMS)开关。
The design and fabrication of a capacitive series RF MEMS switch is reported.
介绍了一种串联电容式RF MEMS开关的设计与制造。
The study on fabrication process of a high k capacitive MEMS switch is presented.
介绍了一种电容式MEMS开关的制作工艺。
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