The study on fabrication process of a high k capacitive MEMS switch is presented.
介绍了一种电容式MEMS开关的制作工艺。
The design and fabrication of a capacitive series RF MEMS switch is reported.
介绍了一种串联电容式RF MEMS开关的设计与制造。
Based on the analysis results, I got the switch inductance from the CLR modal, designed low resonant frequency MEMS capacitive switches and wideband MEMS capacitive switches.
在此基础上，分析了开关的结构参数改变对散射参量的影响。并且提出了等效电感的计算方法，低谐振频率电容式MEMS开关和宽频段电容式MEMS开关的设计方法。
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