The experiments of simulation and application for actual MEMS device were done by proposed algorithms.
用已提出的算法，进行了模拟实验和应用在实际MEMS器件中的实验。
The MEMS device has wonderful functionality, controllability, integration, robustness and so on.
MEMS器件具有很好的功能性、集成性、可控性和鲁棒性等等。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统，设计了一套频闪驱动电路，用于采集高速运动的MEMS器件的清晰图像。
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