At last, two kinds of models are Elaborated on MEMS device and its packaging.

阐述了MEMS器件及其封装中主要的两种模型。

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Provided is a MEMS device 800 comprising an integrated post and deformable layer 870.

本发明提供一种微机电系统（MEMS）装置800，其包括集成柱和可变形层870。

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The MEMS device has wonderful functionality, controllability, integration, robustness and so on.

MEMS器件具有很好的功能性、集成性、可控性和鲁棒性等等。

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One of the smallest MEMS microphones found by iSuppli is a device just over 1mm thick.

ECONOMIST: Noise-cancelling technology

But from a product standpoint, the fastest growth will be seen in conventional device categories like accelerometers and radio frequency MEMS that target consumer applications.

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