Emerging 3d interconnection technologies and high volume MEMS applications require cost effective mass production DRIE systems.

新兴的3d互联技术以及高产量的MEMS应用需要成本低廉以及高产量的深层反应离子刻蚀系统。

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This paper reviews the techniques and applications of diamond MEMS devices.

本文主要综述了金刚石MEMS器件的技术和应用。

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This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.

介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。

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The number of cellphone applications for MEMS microphones doubled between 2005 and 2006 to reach 20% of mobile phones manufactured, according to The Information Network.

FORBES: Magazine Article

But from a product standpoint, the fastest growth will be seen in conventional device categories like accelerometers and radio frequency MEMS that target consumer applications.

FORBES: Magazine Article

STMicroelectronics is now adding new product lines, applications and customers to further increase its MEMS business.

FORBES: Chipmaker STMicroelectronics Sees Big Opportunity In Micro Sensors