Emerging 3d interconnection technologies and high volume MEMS applications require cost effective mass production DRIE systems.
新兴的3d互联技术以及高产量的MEMS应用需要成本低廉以及高产量的深层反应离子刻蚀系统。
This paper reviews the techniques and applications of diamond MEMS devices.
本文主要综述了金刚石MEMS器件的技术和应用。
This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
MEMS is an amalgamation of multifold subjects and it can find broad applications in various fields.
微电子机械系统（MEMS）是多种学科的交叉融合，应用领域极为广泛。
Then, communication devices based on MEMS technology and their applications are reviewed.
重点综述了基于MEMS技术的通信器件及其应用。
The category of SOI wafers and its characteristics and applications in MEMS have been introduced, typical products and state of the art and trends are summarized.
介绍了SOI晶片的种类，SOI晶片在传感器和MEMS中应用的特点、SOI传感器的典型产品以及发展趋势。
We believe that MEMS phase shifter will have large technical potential and wide applications.
作者相信MEMS移相器在射频通信领域将具有巨大的潜力和广泛的应用前景。
This paper presents the technical characteristics, key technologies and the manufacture processes of MEMS, Its applications in spacecraft are also addressed.
论述了微机电系统的技术特征、主要技术和加工工艺，并展望了微机电系统在航天器上的应用前景。
Based on serial port communication, a sort of long-distance control applications of MEMS packaging by laser was introduced.
介绍一种基于串口通信，激光封装MEMS芯片的远程控制应用方案。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
MEMS(Micro Electronic Mechanical System) accelerometers have wide applications in gauge check.
MEMS加速度传感器在计量检测中有着广泛的应用。
Several typical silicon based MEMS processing technologies and applications are introduced, and the development tendencies of MEMS processing technology are prospected.
介绍了几种典型的硅基MEMS加工技术以及应用，并简单展望了MEMS加工技术发展趋势。
The COF/MEMS packaging technology is well-suited for many microsystem packaging applications such as micro-optics and radio frequency(RF) devices.
COF/MEMS封装技术非常适合于诸如微光学及无线射频器件等很多微系统封装的应用。
The principle, advantages and disadvantages, machining precision, and applications of MEMS processing technology are described.
阐述了这些MEMS加工技术的工艺原理、优缺点、加工精度、应用等。
Electrochemical actuators have promising potential applications in the fields of micro-electromechanical systems (MEMS) and biomechanical biomedicine.
电化学驱动器在微电子制造系统(MEMS)和生物医疗领域都有广泛的应用前景。
Micromachined vibratory gyroscopes processed by MEMS technology have the merit of small size, light weight, low cost, and have a variety of applications in many fields nowadays.
微电子机械系统(MEMS)技术加工的微机械陀螺仪具有体积小、重量轻、成本低、容易批量化生产等优点，当前在许多领域具有非常广阔的应用。
This paper introduces the newest results of recent research on microscale thermal science and its applications in MEMS.
主要介绍了微尺度热科学最新研究成果及其在MEMS中的应用。
Electromagnetic micromotor is an ideal micro actuator for MEMS, micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications.
电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。
The reliability of MEMS has become the key problem for its commercial applications.
MEMS的可靠性已经成为它能否成功地实现商品化的一个关键问题。
The reliability of MEMS has become the key problem for its commercial applications.
MEMS的可靠性已经成为它能否成功地实现商品化的一个关键问题。
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