soft interference lithography 软性干涉光刻技术
laser interference lithography 激光干涉光刻
Soft X-ray interference lithography 软X射线干涉光刻
INTERFERENCE LASER LITHOGRAPHY 干涉式激光蚀刻法
The fabrication methods of MPC include electron beam lithography with subsequent evaporation and lift-off, interference lithography with dry-etching technology etc.
制备金属光子晶体方法包括:电子束刻蚀结合后续剥离法、激光干涉光刻结合干刻蚀技术等。
参考来源 - 波导耦合金属光子晶体的制备和光学特性研究·2,447,543篇论文数据,部分数据来源于NoteExpress
以上来源于: WordNet
应用推荐