...偏测量术； 外差干涉； 非线性误差； 薄膜测量； 声光调制器 [gap=1321]Key words: ellipsometry; heterodyne interferometer; nonlinearity error; film measurement; acoustooptic modulator ..
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... 外差干涉仪 (Heterodyne interferometer) 激光陀螺 (Laser gyroscope) 光学相干断层扫描仪 (Optical Coherence Tomography) ...
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a heterodyne interferometer 外差干涉仪
super heterodyne interferometer 超外差干涉仪
opto-heterodyne interferometer 光外差干涉
An absolute distance heterodyne interferometer using a dual longitudinal mode he ne laser is proposed.
提出了一种采用双纵模稳频激光器的新型绝对距离测量外差干涉仪。
A novel laser heterodyne interferometer used for on-line measuring surface roughness has been developed.
一种新型的、用于在线测量表面粗糙度的激光外差干涉仪已研制完成。
Laser heterodyne interferometer has advantages of high measuring precision and anti-environment disturbance ability.
激光外差干涉仪以其测量精度高、抗环境干扰能力强等优点得到了广泛的应用。
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