An absolute distance heterodyne interferometer using a dual longitudinal mode he ne laser is proposed.
提出了一种采用双纵模稳频激光器的新型绝对距离测量外差干涉仪。
A novel laser heterodyne interferometer used for on-line measuring surface roughness has been developed.
一种新型的、用于在线测量表面粗糙度的激光外差干涉仪已研制完成。
Laser heterodyne interferometer has advantages of high measuring precision and anti-environment disturbance ability.
激光外差干涉仪以其测量精度高、抗环境干扰能力强等优点得到了广泛的应用。
Experiment results are shown with a heterodyne interferometer by using this method to measure the dynamic displacement of a PZT.
文中还给出了用此方法进行信号处理的外差干涉仪测量压电陶瓷动态位移的实验结果。
Nonlinear errors caused by mis-installation of common-path heterodyne interferometer affected the measurement precision of the system.
共光路外差干涉仪具有很高的分辨率，但因为安装、调试误差会产生非线性误差，影响系统的测量精度。
Based on the optical heterodyne interferometer and transmission ellipsometry, a new fast measurement technique of nanometer film was presented computational.
结合激光外差干涉法和透射式椭偏测量原理，研究了一种快速、高精度测量纳米厚度薄膜光学参数的方法。
Two kinds of signal processing methods for heterodyne interferometer, phase locked frequency demodulation and combinatorial frequency demodulation are presented in this paper.
介绍了两种激光外差干涉信号的处理方法锁相频率解调法及组合频率解调法。
This paper is concerned with the principle of a non - contact optical instrument for measuring the surface roughness of a magnetic disk with an opto-heterodyne interferometer.
根据外差干涉计量术的原理，研制了非接触式的光外差干涉磁盘表面粗糙度测量仪。
This paper describes a measuring system basing on an optical heterodyne interferometer, which utilizes a multi-mode laser diode and coupled optical fibers to adjust the coherent length of the system.
研究了一种采用多模半导体激光与耦合光纤、采取声光调制及调节相干长度的外差干涉系统。
This paper present optical false heterodyne method. It's modulator of phase is constructed by LN crystal in Michelson's interferometer.
本文报导光学赝外差方法，它是利用LN晶体放置在迈克尔逊干涉仪的参考臂中做电光相位调制。
This paper present optical false heterodyne method. It's modulator of phase is constructed by LN crystal in Michelson's interferometer.
本文报导光学赝外差方法，它是利用LN晶体放置在迈克尔逊干涉仪的参考臂中做电光相位调制。
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