Nano-TiO_2 film, as a kind of function thin film, has not only excellent intensity, rigidity, abradability, erosion resistance and compactability, but also photochemical catalysis, photodegradation, disinfection, sterilization and self cleaning.
纳米二氧化钛薄膜作为一种功能薄膜不仅具有较高的强度、硬度、耐磨性、耐蚀性和致密性，而且具有光催化、光降解、消毒、杀菌和自清洁等功能。
参考来源 - 激光晶化二氧化钛非晶薄膜组织与性能研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Characteristic of ferroelectric storage element has be en introduced in this paper. A few main preparation methods of information function thin film have been recommended. We present its use field.
本文介绍了铁电存储器的特性，提出了信息功能薄膜的几种主要的制备方法，指出了它的应用领域。
A new thin film preparation system has been devised and assembled. The system owns two kinds of thin film preparation function.
设计并制作了一套具有真空蒸发沉积和化学气相沉积两种薄膜制备功能的系统。
Piezoelectric material is applied as MEMS function material extensively. PZT thin film as one type of piezoelectric material with excellent piezoelectricity is studied by lots of scholar.
压电薄膜材料是适用于MEMS器件的功能薄膜材料，其中，PZT薄膜具有较高的压电性能，受到研究者的青睐。
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