A new thin film preparation system has been devised and assembled. The system owns two kinds of thin film preparation function.
设计并制作了一套具有真空蒸发沉积和化学气相沉积两种薄膜制备功能的系统。
Piezoelectric material is applied as MEMS function material extensively. PZT thin film as one type of piezoelectric material with excellent piezoelectricity is studied by lots of scholar.
压电薄膜材料是适用于MEMS器件的功能薄膜材料，其中，PZT薄膜具有较高的压电性能，受到研究者的青睐。
Preferably, the metal (b) has a barrier function against a metal contained in the metal thin film.
优选所述金属(B)对金属薄膜的金属具有阻挡功能。
Preferably, the metal (b) has a barrier function against a metal contained in the metal thin film.
优选所述金属(B)对金属薄膜的金属具有阻挡功能。
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