cyclotron-frequency magnetron 回旋加速频率式磁控管
mid-frequency magnetron sputtering 中频磁控溅射
Radio-frequency magnetron sputtering 用射频磁控溅射法
radio frequency magnetron sputtering method 射频磁控溅射法
radio frequency magnetron 射频磁控
high frequency magnetron sputtering 高频磁控溅射
middle frequency magnetron sputtering 中频磁控溅射
Metal aluminum films were deposited on AAO templates by radio-frequency magnetron sputtering.
用射频磁控溅射法在阳极氧化铝模板表面制备了金属铝膜。
ITO thin films were prepared by radio-frequency magnetron sputtering technique at different sputtering power, and applied to HIT solar cells.
采用射频磁控溅射技术在不同射频功率下沉积了ITO薄膜，并将其应用于HIT太阳电池。
In this paper, several thin films samples of vanadium oxide were got by high-frequency Magnetron sputter with pure metal vanadium as sputter source.
本文以高纯金属钒作为靶材，采用磁控溅射工艺制备氧化钒薄膜。
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