Hard mask etching 硬掩模付蚀
etching mask [印刷] 腐蚀掩模 ; 抗蚀剂掩模 ; 蚀刻罩幕
Printing Etching Mask 印刷蚀刻光罩
Etching g mask 抗蚀剂掩模
etching all-metal mask 腐蚀全金属掩模
Then, a micro exhaust duct was etched on an electroforming deposit through mask etching technology.
然后利用掩膜腐蚀方法在铸层上腐蚀出微排气通道。
Three solutions of optimization of experimental parameters, adding beam mask and using etching technologies for improving atom lithography quality are presented.
提出了优化实验参数、增加束掩模和利用刻蚀技术三种改善原子光刻实验的方法。
Photoresist grating was fabricated by holography, and it was used in the mask of ion etching.
采用全息法制备了光刻胶光栅，并用该光栅掩膜离子蚀刻。
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