Reactive Ion Etching 反应离子刻蚀 ; 反应离子腐蚀 ; 反应性离子蚀刻
ion etching chamber 离子蚀刻室
ion etching station 离子束腐蚀机
high frequency ion etching 高频离子腐蚀
ion etching equipment 离子刻蚀设备
Deep Reactive Ion Etching 深层离子蚀刻技术 ; 深反应离子刻蚀
Ion etching technology 离子刻蚀技术
Reactive Ion Etching System 反应离子刻蚀系统
argon ion etching 氩离子蚀刻
Photoresist grating was fabricated by holography, and it was used in the mask of ion etching.
采用全息法制备了光刻胶光栅,并用该光栅掩膜离子蚀刻。
The thickness of absorbed films was measured for three CWM dispersants by X-rayphotoelectric spectrometer and argon-ion etching in this report.
本文采用X光电子能谱加氩离子刻蚀法,测出三种分散剂在煤表面吸附膜的近似厚度。
This accelerometer is fabricated by N type silicon wafer. To obtain high aspect ratio structure, deep reactive ion etching(DRIE) process is employed.
加速度计用普通的N型硅片制造,为了刻蚀高深宽比的结构,使用了深反应离子刻蚀(DRIE)工艺。
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