刻蚀光栅
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etched grating 蚀刻光栅
etched diffraction grating 衍射光栅 ; 蚀刻衍射光栅 ; 刻蚀衍射光栅
etched diffraction grating edg 蚀刻衍射光栅
deep-etched concave diffraction grating edg 深刻蚀凹面衍射光栅
The fabrication process of a compact planar waveguide etched-grating(EDG) demultiplexer based on silicon-on-insulator(SOI) is studied.
研究了基于绝缘材料上的硅（SOI）材料的平面波导刻蚀光栅分波器的主要制作工艺。
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