用俄歇电子能谱 （AES） 研究高真空室中纯铁和多能量叠加注碳纯铁表面与氧气吸附及初始氧化过程。
The initial oxidation of pure iron and implanted samples which were overlapped energy ion–implanted with C ions was studied by auger electron spectroscopy (AES).
本文以动态绝缘为设计目标，提出高电压真空灭弧室的全程优化设计方法。
Aim at the higher level of dynamic insulation design, a whole optimized design method for high voltage vacuum interrupters is proposed.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
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