用俄歇电子能谱 （AES）研究高真空室中纯铁和多能量叠加注碳纯铁表面与氧气吸附及初始氧化过程。
The initial oxidation of pure iron and implanted samples which were overlapped energy ion–implanted with C ions was studied by auger electron spectroscopy (AES).
本文以动态绝缘为设计目标，提出高电压真空灭弧室的全程优化设计方法。
Aim at the higher level of dynamic insulation design, a whole optimized design method for high voltage vacuum interrupters is proposed.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
本发明的优点是：在真空室中进行加热处理，无氧化、方法简单、操作方便、效率高；
The invention has the advantages that no oxidation, simple method, convenient operation and high efficiency are achieved since the heating treatment is conducted in the vacuum chamber;
在高真空系统(真空室)中，它通常接地，起到屏蔽作用。
In a high vacuum system, the vacuum chamber, which is commonly grounded, ACTS as the shield.
两个镀膜室通过预抽真空管道和蝶阀、高真空三通管道和闸板阀组成一个整体。
Two film plating Chambers are formed into a whole via a forvacuum pipeline, a butterfly valve, a high-vacuum three-way pipeline and a gate valve.
两个镀膜室通过预抽真空管道和蝶阀、高真空三通管道和闸板阀组成一个整体。
Two film plating Chambers are formed into a whole via a forvacuum pipeline, a butterfly valve, a high-vacuum three-way pipeline and a gate valve.
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